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Measurement of Discharge and Plasma Parameters in a Vacuum (Gasless) Magnetron Sputtering System

Crossref DOI link: https://doi.org/10.1134/S1062873824710638

Published Online: 2025-03-18

Published Print: 2024-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Shandrikov, M. V. https://orcid.org/0000-0002-0844-0356
Azhgikhin, M. I. https://orcid.org/0000-0002-1558-1026
Bugaev, A. S. https://orcid.org/0000-0002-7406-6235
Cherkasov, A. A. https://orcid.org/0000-0002-2429-4969
Moskvin, P. V. https://orcid.org/0000-0002-5240-9970
Oks, E. M. https://orcid.org/0000-0002-9323-0686
Savkin, K. P. https://orcid.org/0000-0001-6984-8550
Shcheglov, K. A. https://orcid.org/0009-0003-8096-5514
Yushkov, G. Yu. https://orcid.org/0000-0002-7615-6058
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 30 November 2024

Revised: 9 December 2024

Accepted: 12 December 2024

First Online: 18 March 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.