Crossmark

Effect of Nonlinearity on Mode Localization Phenomena in Dynamics of MEMS Resonant Sensor with Two Electrostatically Coupled Microbeams

Published Online: 2021-06-16

Published Print: 2021-04

Authors

Morozov, N. I.

Indeitsev, D. A.

Igumnova, V. S.

Lukin, A. V.

Popov, I. A.

Shtukin, L. V.
License Information

Text and Data Mining valid from 2021-04-01

Version of Record valid from 2021-04-01
More Information

Article History

Received: 16 November 2020

Revised: 16 December 2020

Accepted: 17 December 2020

First Online: 16 June 2021

Document is current