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Creation of lithographic masks using a scanning probe microscope

Published Online: 2015-11-04

Published Print: 2015-11

Authors

Bizyaev, D. A.

Bukharaev, A. A.

Ziganshina, S. A.

Nurgazizov, N. I.

Khanipov, T. F.

Chuklanov, A. P.
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Text and Data Mining valid from 2015-11-01

Version of Record valid from 2015-11-01
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Article History

Received: 15 February 2015

First Online: 4 November 2015

Document is current