Simulation of the Bosch process for micro- and nanostructures
Crossref DOI link: https://doi.org/10.1134/S1063739715070124
Published Online: 2015-11-14
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mukhamadeev, R. A.
Danilina, T. I.
Troyan, P. E.
Text and Data Mining valid from 2015-11-14
Version of Record valid from 2015-11-14
Article History
Received: 10 April 2014
First Online: 14 November 2015