Characteristics of the kinetics of periodic structures CMP for a nonlinear pressure dependence of the polishing rate
Crossref DOI link: https://doi.org/10.1134/S1063739716030045
Published Online: 2016-07-14
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Goldstein, R. V.
Makhviladze, T. M.
Sarychev, M. E.
License valid from 2016-07-01