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Mode optimization of retrograde pocket doping in SOI-MOS VLSI transistors

Published Online: 2016-07-14

Published Print: 2016-07

Authors

Amirkhanov, A. V.

Volkov, S. I.

Glushko, A. A.

Zinchenko, L. A.

Makarchuk, V. V.

Shakhnov, V. A.
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Text and Data Mining valid from 2016-07-01

Version of Record valid from 2016-07-01
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Article History

Received: 25 November 2015

First Online: 14 July 2016

Document is current