Secondary ion mass spectrometry study of the formation of a nanometer oxide film on a titanium nitride surface
Crossref DOI link: https://doi.org/10.1134/S1063739716040065
Published Online: 2016-07-14
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mordvintsev, V. M.
Naumov, V. V.
Simakin, S. G.
License valid from 2016-07-01