Investigation of textured aluminum nitride films prepared by chemical vapor deposition
Crossref DOI link: https://doi.org/10.1134/S1063739717010085
Published Online: 2017-03-11
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Red’kin, A. N.
Ryzhova, M. V.
Yakimov, E. E.
Roshchupkin, D. V.
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