Effect of the mixture composition on the electrophysical parameters and emission spectra of CF2Cl2/Ar and CF2Cl2/He plasma
Crossref DOI link: https://doi.org/10.1134/S1063739717040072
Published Online: 2017-07-22
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pivovarenok, S. A.
License valid from 2017-07-01