Effect of diamond dicing of SiC device wafers on the technical and operational parameters of monolithic integrated circuits
Crossref DOI link: https://doi.org/10.1134/S1063739717050031
Published Online: 2017-09-14
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gamkrelidze, S. A.
Trofimov, A. A.
Shchavruk, N. V.
Text and Data Mining valid from 2017-09-01
Version of Record valid from 2017-09-01
Article History
Received: 22 December 2016
First Online: 14 September 2017