Development of the Technology of Magnetron Sputtering Deposition of LiPON Films and Investigation of Their Characteristics
Crossref DOI link: https://doi.org/10.1134/S1063739717060099
Published Online: 2018-02-06
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Vasilev, S. V.
Lebedev, M. E.
Mazaletskii, L. A.
Metlitskaya, A. V.
Mironenko, A. A.
Naumov, V. V.
Novozhilova, A. V.
Rudyi, A. S.
Fedorov, I. S.
Text and Data Mining valid from 2017-11-01
Article History
Received: 10 January 2017
First Online: 6 February 2018