Evolution of Models and Algorithms for Calculating the Parameters of Technological Processes to Obtain Materials for Micro- and Nanoelectronics
Crossref DOI link: https://doi.org/10.1134/S1063739717080091
Published Online: 2018-03-07
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Krapukhin, V. V.
Kosushkin, V. G.
Kozhitov, L. V.
Kostishin, V. G.
Muratov, D. G.
Popkova, A. V.
Text and Data Mining valid from 2017-12-01
Article History
First Online: 7 March 2018