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Finite Element Simulation of Frequency Response of MEMS-Microphone

Crossref DOI link: https://doi.org/10.1134/S106373971803006X

Published Online: 2018-05-05

Published Print: 2018-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Grigor’ev, D. M.

Godovitsyn, I. V.

Amelichev, V. V.

Generalov, S. S.
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Text and Data Mining valid from 2018-05-01
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Article History

Received: 9 October 2017

First Online: 5 May 2018