Applications of the Technology of Fast Neutral Particle Beams in Micro- and Nanoelectronics
Crossref DOI link: https://doi.org/10.1134/S1063739718050049
Published Online: 2018-09-04
Published Print: 2018-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kudrya, V. P.
Maishev, Yu. P.
Text and Data Mining valid from 2018-09-01
Version of Record valid from 2018-09-01
Article History
Received: 7 March 2018
First Online: 4 September 2018