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Atomic Layer Deposition of Y2O3 Using Tris(butylcyclopentadienyl)yttrium and Water

Crossref DOI link: https://doi.org/10.1134/S1063739719010025

Published Online: 2019-04-22

Published Print: 2019-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Abdulagatov, A. I.

Amashaev, R. R.

Ashurbekova, Kr. N.

Ramazanov, Sh. M.

Palchaev, D. K.

Maksumova, A. M.

Rabadanov, M. Kh.

Abdulagatov, I. M.
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Article History

Received: 21 May 2018

First Online: 22 April 2019