Etching of GaAs in the Plasma of a Freon R-12–Argon (CCl2F2/Ar) Mixture
Crossref DOI link: https://doi.org/10.1134/S1063739719010062
Published Online: 2019-03-13
Published Print: 2018-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Murin, D. B.
Dunaev, A. V.
Text and Data Mining valid from 2018-11-01
Article History
Received: 22 January 2018
First Online: 13 March 2019