Reflection Spectra Modification of Diazoquinone-Novolak Photoresist Implanted with B and P Ions
Crossref DOI link: https://doi.org/10.1134/S1063739719020021
Published Online: 2019-06-13
Published Print: 2019-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Brinkevich, D. I.
Kharchenko, A. A.
Prosolovich, V. S.
Odzhaev, V. B.
Brinkevich, S. D.
Yankovskii, Yu. N.
Text and Data Mining valid from 2019-05-01
Version of Record valid from 2019-05-01
Article History
Received: 16 September 2018
Revised: 30 October 2018
Accepted: 30 October 2018
First Online: 13 June 2019