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Estimating the Interrelation between the Rate of Atomic Layer Deposition of Thin Platinum-Group Metal Films and the Molecular Mass of Reactant Precursors

Crossref DOI link: https://doi.org/10.1134/S1063739719040103

Published Online: 2019-07-19

Published Print: 2019-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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