Effect of the Pressure of Oxygen on the Plasma Oxidation of the Titanium Nitride Surface
Crossref DOI link: https://doi.org/10.1134/S1063739719060064
Published Online: 2020-01-14
Published Print: 2019-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mordvintsev, V. M.
Naumov, V. V.
Simakin, S. G.
Text and Data Mining valid from 2019-11-01
Version of Record valid from 2019-11-01
Article History
Received: 29 January 2019
Revised: 29 January 2019
Accepted: 4 May 2019
First Online: 14 January 2020