Electronic Conductivity in a Р+-Ion Implanted Positive Photoresist
Crossref DOI link: https://doi.org/10.1134/S1063739719060076
Published Online: 2020-03-10
Published Print: 2020-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Oleshkevich, A. N.
Lapchuk, N. M.
Odzhaev, V. B.
Karpovich, I. A.
Prosolovich, V. S.
Brinkevich, D. I.
Brinkevich, S. D.
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Article History
Received: 17 May 2019
Revised: 22 May 2019
Accepted: 4 June 2019
First Online: 10 March 2020