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Plasma Parameters and Kinetics of Active Particles in the Mixture CHF3 + O2 + Ar

Published Online: 2020-07-16

Published Print: 2020-07

Authors

Efremov, A. M.

Murin, D. B.

Kwon, K.-H.
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Text and Data Mining valid from 2020-07-01

Version of Record valid from 2020-07-01
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Article History

Received: 1 November 2019

Revised: 1 November 2019

Accepted: 2 December 2019

First Online: 16 July 2020

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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