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Modeling the Sensitive Element of the Sandwich Construction of a Capacitive Micromechanical Accelerometer, Taking into Account the Change in the Dielectric Constant

Crossref DOI link: https://doi.org/10.1134/S1063739721070027

Published Online: 2021-12-29

Published Print: 2021-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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