Nanosized Modification of the Silicon Surface by the Method of Focused Ion Beams
Crossref DOI link: https://doi.org/10.1134/S1063739722030076
Published Online: 2022-06-07
Published Print: 2022-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kots, I. N.
Polyakova, V. V.
Morozova, Yu. V.
Kolomiytsev, A. S.
Klimin, V. S.
Ageev, O. A.
Text and Data Mining valid from 2022-06-01
Version of Record valid from 2022-06-07
Article History
Received: 11 November 2021
Revised: 10 January 2022
Accepted: 11 January 2022
First Online: 7 June 2022