Development of a Sensitive Element of a Micromechanical Accelerometer
Crossref DOI link: https://doi.org/10.1134/S1063739722070162
Published Online: 2023-01-09
Published Print: 2022-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kochurina, E. S.
Anchutin, S. A.
Kalugin, V. V.
Zaryankin, N. M.
Timoshenkov, A. S.
Dernov, I. S.
Text and Data Mining valid from 2022-12-01
Version of Record valid from 2022-12-01
Article History
Received: 25 May 2021
Revised: 7 September 2021
Accepted: 21 December 2021
First Online: 9 January 2023