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Effect of Treatment in Nitrogen Plasma on the Electrical Parameters of AlGaN/GaN Heterostructures

Published Online: 2023-03-19

Published Print: 2022-12

Authors

Enisherlova, K. L.

Seidman, L. A.

Bogolyubova, S. Yu.
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Text and Data Mining valid from 2022-12-01

Version of Record valid from 2022-12-01
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Article History

Received: 19 August 2022

Revised: 30 August 2022

Accepted: 3 September 2022

First Online: 19 March 2023

Document is current