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On the Effect of the Cl2 + O2 + Ar Mixture Composition on the Concentrations of Chlorine and Oxygen Atoms in a Plasma

Published Online: 2022-12-23

Published Print: 2022-12

Authors

Amirov, I. I.

Izyumov, M. O.

Efremov, A. M.
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Text and Data Mining valid from 2022-12-01

Version of Record valid from 2022-12-01
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Article History

Received: 17 May 2022

Revised: 12 July 2022

Accepted: 12 July 2022

First Online: 23 December 2022

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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