Crossmark

Parameters and Composition of Plasma in a CF4 + H2 + Ar Mixture: Effect of CF4/H2 Ratio

Published Online: 2024-05-04

Published Print: 2024-02

Authors

Miakonkikh, A. V.

Kuzmenko, V. O.

Efremov, A. M.

Rudenko, K. V.
License Information

Text and Data Mining valid from 2024-02-01

Version of Record valid from 2024-02-01
More Information

Article History

Received: 26 September 2023

Revised: 26 September 2023

Accepted: 10 October 2023

First Online: 4 May 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

Document is current