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Simulation of the Silicon Sensitive Element of Capacitive Accelerometer Using the Analytical Model

Published Online: 2024-03-21

Published Print: 2023-12

Authors

Thu, Paing Soe

Kalugin, V. V.

Kochurina, E. S.
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Text and Data Mining valid from 2023-12-01

Version of Record valid from 2023-12-01
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Article History

Received: 10 October 2023

Revised: 10 October 2023

Accepted: 25 November 2023

First Online: 21 March 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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