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Authors
Koshelev, V.
Demin, G.
Dyuzhev, N.
Chinenkov, M.
Ryabov, V.
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Article History
Received: 18 November 2023
Revised: 18 November 2023
Accepted: 25 November 2023
First Online: 21 March 2024
CONFLICT OF INTEREST
: The authors of this work declare that they have no conflicts of interest.
: In order to increase from sensor it is recommended to increase heat of bridge resistors as well. The results obtained can be applied to the development of MEMS thermal flow sensors that implement a sensitive and low-power method for measuring flow rate in a wide range, regardless of its direction.
