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Hydrogen Plasma under Conditions of Electron-Cyclotron Resonance in Microelectronics Technology

Published Online: 2023-07-05

Published Print: 2023-06

Authors

Polushkin, E. A.

Nefed’ev, S. V.

Koval’chuk, A. V.

Soltanovich, O. A.

Shapoval, S. Yu.
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Text and Data Mining valid from 2023-06-01

Version of Record valid from 2023-06-01
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Article History

Received: 13 December 2022

Revised: 2 February 2023

Accepted: 2 February 2023

First Online: 5 July 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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