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Mechanisms of the Redistribution of Carbon Contamination in Films Formed by Atomic Layer Deposition

Published Online: 2023-10-01

Published Print: 2023-08

Authors

Fadeev, A. V.

Myakon’kikh, A. V.

Smirnova, E. A.

Simakin, S. G.

Rudenko, K. V.
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Text and Data Mining valid from 2023-08-01

Version of Record valid from 2023-08-01
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Article History

Received: 20 March 2023

Revised: 20 April 2023

Accepted: 22 April 2023

First Online: 1 October 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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