Crossmark

Gas Phase Composition and Kinetics of Fluorine Atoms in SF6 Plasma

Published Online: 2025-02-10

Published Print: 2024-12

Authors

Myakonkikh, A. V.

Kuzmenko, V. O.

Efremov, A. M.

Rudenko, K. V.
License Information

Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
More Information

Article History

Received: 26 July 2024

Revised: 20 September 2024

Accepted: 20 September 2024

First Online: 10 February 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

Document is current