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Development and Testing of the Atomic Layer Deposition Technological Platform for the Synthesis of Micro- and Nanoelectronics Materials

Published Online: 2025-06-20

Published Print: 2025-02

Authors

Amashaev, R. R.

Isubgadzhiev, Sh. M.

Rabadanov, M. Kh.

Abdulagatov, I. M.
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Text and Data Mining valid from 2025-02-01

Version of Record valid from 2025-02-01
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Article History

Received: 24 October 2024

Revised: 20 February 2025

Accepted: 20 February 2025

First Online: 20 June 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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