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Investigation of Deposition Rates in Bilayer Silicon Nitride Structures Using Ellipsometry and the Maxwell Garnett Model

Crossref DOI link: https://doi.org/10.1134/S1063739724600973

Published Online: 2025-08-06

Published Print: 2025-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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