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Design and Manufacturing Features of a Three-Dimensional Microsystem with Side Commutations

Published Online: 2025-02-10

Published Print: 2024-12

Authors

Belyakov, I. A.

Vertyanov, D. V.

Kochergin, M. D.

Timoshenkov, S. P.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 7 March 2023

Revised: 11 April 2023

Accepted: 31 May 2023

First Online: 10 February 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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