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Features of the Three-Dimensional Profile Control of the Elements and Structures of Nanoscale ICs: A Review

Published Online: 2025-02-10

Published Print: 2024-12

Authors

Nelyubin, I. V.

Putrya, M. G.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 19 December 2022

Revised: 1 January 2023

Accepted: 30 March 2023

First Online: 10 February 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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