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Multilevel Metallization of High-Temperature Silicon IСs Based on Tungsten. Physics and Technology: A Review

Published Online: 2025-02-10

Published Print: 2024-12

Authors

Timakov, A. V.

Gornostay-Polsky, V. S.

Shevyakov, V. I.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 4 October 2022

Revised: 27 December 2022

Accepted: 6 February 2023

First Online: 10 February 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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