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Spectroscopy and Actinometry of Halogen-Containing Inductively Coupled Plasma for Anisotropic Etching

Published Online: 2025-08-06

Published Print: 2025-04

Authors

Kuzmenko, V. O.
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Text and Data Mining valid from 2025-04-01

Version of Record valid from 2025-04-01
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Article History

Received: 18 February 2025

Revised: 20 March 2025

Accepted: 20 March 2025

First Online: 6 August 2025

CONFLICT OF INTEREST

: As author of this work, I declare that I have no conflicts of interest.

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