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Measuring the Adhesion Energy between MEMS Structures Using an Adhered Cantilever

Published Online: 2025-08-06

Published Print: 2025-04

Authors

Uvarov, I. V.

Morozov, O. V.

Postnikov, A. V.

Svetovoy, V. B.
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Text and Data Mining valid from 2025-04-01

Version of Record valid from 2025-04-01
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Article History

Received: 22 January 2025

Revised: 20 March 2025

Accepted: 20 March 2025

First Online: 6 August 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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