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Structure of Thin Films of Titanium Nitride Formed by Magnetron Sputtering

Published Online: 2025-08-31

Published Print: 2025-06

Authors

Isaev, A. G.

Rogozhin, A. E.
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Text and Data Mining valid from 2025-06-01

Version of Record valid from 2025-06-01
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Article History

Received: 26 March 2025

Revised: 15 April 2025

Accepted: 15 April 2025

First Online: 31 August 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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