A Miniature Electrostatic Actuator with Enhanced Contact Force for a Resistive MEMS Switch
Crossref DOI link: https://doi.org/10.1134/S1063739725600864
Published Online: 2026-01-13
Published Print: 2025-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Uvarov, I. V.
Belozerov, I. A.
Text and Data Mining valid from 2025-12-01
Version of Record valid from 2025-12-01
Article History
Received: 1 July 2025
Revised: 15 August 2025
Accepted: 10 September 2025
First Online: 13 January 2026
CONFLICT OF INTEREST
: The authors of this work declare that they have no conflicts of interest.