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Study of the Influence of Mo–Si Structural Parameters on the Optical Properties of Masking Coatings for Photomasks

Published Online: 2026-03-23

Published Print: 2025-12

Authors

Krokhan, N. V.

Sharipov, R. A.

Novoseltsev, A. I.

Novikova, O. V.

Shevyakov, V. I.

Anikin, A. V.
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Text and Data Mining valid from 2025-12-01

Version of Record valid from 2025-12-01
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Article History

Received: 10 November 2025

Revised: 15 November 2025

Accepted: 15 November 2025

First Online: 23 March 2026

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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