Formation of Nanoscale Radiation Fluxes for X-ray Scanning Lithography
Crossref DOI link: https://doi.org/10.1134/S1063739725601626
Published Online: 2026-03-23
Published Print: 2025-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Egorov, V. K.
Egorov, E. V.
Text and Data Mining valid from 2025-12-01
Version of Record valid from 2025-12-01
Article History
Received: 10 November 2025
Revised: 15 November 2025
Accepted: 15 November 2025
First Online: 23 March 2026
CONFLICT OF INTEREST
: The authors of this work declare that they have no conflicts of interest.