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Features of Dissipative Processes during Annealing of Silicon Structures with Buried Silicate Layers

Published Online: 2026-03-23

Published Print: 2025-12

Authors

Denisenko, Yu. I.
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Text and Data Mining valid from 2025-12-01

Version of Record valid from 2025-12-01
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Article History

Received: 10 November 2025

Revised: 15 November 2025

Accepted: 15 November 2025

First Online: 23 March 2026

CONFLICT OF INTEREST

: As author of this work, I declare that I have no conflicts of interest.

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