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Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure

Crossref DOI link: https://doi.org/10.1134/S106377101503015X

Published Online: 2015-07-25

Published Print: 2015-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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