Development and Study of Composite Acoustic Resonators with Al/(Al, Sc)N/Mo/Diamond Structure with a High Q Factor in the UHF Range
Crossref DOI link: https://doi.org/10.1134/S1063771019030072
Published Online: 2019-06-07
Published Print: 2019-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sorokin, B. P.
Novoselov, A. S.
Kvashnin, G. M.
Luparev, N. V.
Asafiev, N. O.
Shipilov, A. B.
Aksenenkov, V. V.
Text and Data Mining valid from 2019-05-01
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Article History
First Online: 7 June 2019