Study of the structural quality of heteroepitaxial silicon-on-sapphire structures by high-resolution X-ray diffraction, X-ray reflectivity, and electron microscopy
Crossref DOI link: https://doi.org/10.1134/S1063774514030043
Published Online: 2014-05-24
Published Print: 2014-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Blagov, A. E.
Vasiliev, A. L.
Golubeva, A. S.
Ivanov, I. A.
Kondratev, O. A.
Pisarevsky, Yu. V.
Presnyakov, M. Yu.
Prosekov, P. A.
Seregin, A. Yu.
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