Atomic and Electronic Structure of SiOx Films Obtained with Hydrogen Electron Cyclotron Resonance Plasma
Crossref DOI link: https://doi.org/10.1134/S1063776120110084
Published Online: 2021-02-04
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Perevalov, T. V.
Iskhakzai, R. M. Kh.
Aliev, V. Sh.
Gritsenko, V. A.
Prosvirin, I. P.
Text and Data Mining valid from 2020-12-01
Version of Record valid from 2020-12-01
Article History
Received: 7 May 2020
Revised: 30 June 2020
Accepted: 1 July 2020
First Online: 4 February 2021