Lifetime Extension of the Gas Discharge Detectors with Plasma Etching of Silicon Deposits in 80%CF4 + 20%CO2
Crossref DOI link: https://doi.org/10.1134/S1063778817090071
Published Online: 2018-03-12
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gavrilov, G. E.
Vakhtel, V. M.
Maysuzenko, D. A.
Tavtorkina, T. A.
Fetisov, A. A.
Shvetsova, N. Yu.
Text and Data Mining valid from 2017-12-01
Version of Record valid from 2017-12-01
Article History
Received: 28 October 2016
First Online: 12 March 2018