Plasma Interaction with Boundary Surfaces in Low-Pressure Radio-Frequency Capacitive Discharge
Crossref DOI link: https://doi.org/10.1134/S106377881910017X
Published Online: 2020-03-17
Published Print: 2019-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Savinov, V. P.
Kruglov, M. S.
Riaby, V. A.
Chervyakov, A. V.
Yakunin, V. G.
Text and Data Mining valid from 2019-12-01
Version of Record valid from 2019-12-01
Article History
Received: 26 June 2019
Revised: 4 July 2019
Accepted: 4 July 2019
First Online: 17 March 2020